Cathodoluminescence study of silicon oxide-silicon interface
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چکیده
منابع مشابه
Guided photoluminescence study ofNd-doped Silicon Rich Silicon Oxide and Silicon Rich Silicon Nitride waveguides
Planar waveguides made of Nd 3+ -doped silicon rich silicon oxide (SRSO) and silicon rich silicon nitride (SRSN) have been fabricated by reactive magnetron sputtering and characterized with special emphasis on the comparison of the guided photoluminescence (PL) properties of these two matrices. Guided fluorescence excited by top surface pumping at 488 nm on planar waveguides was measured as a f...
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plasma-sprayed silicon layers have been used to produce silicon nitride layers with fibrous microstructure which optimizes fracture toughness and strength. SEM examination of the specimens shows that the surface is covered by fine needles and whiskers of Si3N4.In order to study the oxygen contamination effect as well as other contaminants introduced during spraying and nitridation processes, su...
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Depth-resolved cathodoluminescence spectroscopy of silicon supersaturated with sulfur. Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. The MIT Faculty has made this article openly available. Please share how this access benefits you. Your story matters.
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ژورنال
عنوان ژورنال: Semiconductors
سال: 2007
ISSN: 1063-7826,1090-6479
DOI: 10.1134/s1063782607040203